» Valves » Slit Valve

The slit valve has a rectangular opening especially suited for wafer transfer. The unique "L-Motion" eliminates abrasion by lifting the gate prior to applying pressure to the sealing surface.

  • Seal: FKM
  • Internal Leakrate: better than 6,5 x10-10 mbar l/s
  • Pressure Range: 1x10-7 mbar - 2 bar (abs.)
  • Cycles: 2,000,000
  • Installation: any
  • Control Pressure: 4.5bar
Accessories:
 		  References:
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All Gate Valves
Item No. Item Description Slit height
[inch]		 Slit width
[inch]		 Price Add to Cart In Stock
700V-XGT222-32222-1-C Slit Valve, Cassette Type, Gasket Material FKM, Two Axis Bellows, 32 x 222mm, Wafer Size 200mm 1.26 8.74 $ 7,000.00
700V-XGT222-46236-1-C Slit Valve, Cassette Type, Gasket Material FKM, Two Axis Bellows, 46 x 236mm, Wafer Size 200mm 1.81 9.29 $ 7,200.00
700V-XGT312-503366-1-C Slit Valve, Cassette Type, Gasket Material FKM, Two Axis Bellows, 50 x 336mm, Wafer Size 300mm 1.97 13.23 $ 11,000.00